Abstract
We investigate the use of light assisted collisions for the deterministic preparation of individual atoms in a microtrap. Blue detuned light is used in order to ensure that only one of the collision partners is lost from the trap. We obtain a 91% loading efficiency of single Rb-85 atoms. This can be achieved within a total preparation time of 542 ms. A numerical model of the process quantitatively agrees with the experiment giving an in-depth understanding of the dynamics of the process and allowing us to identify the factors that still limit the loading efficiency. The fast loading time in combination with the high efficiency may be sufficient for loading quantum registers at the size required for competitive quantum computing.